A reflection-type coplanar waveguide (CPW) phase shifter fabricated using a standard monolithic microwave integrated circuit (MMIC) process is presented. Air-gap overlay CPW couplers were employed for wideband 3 dB coupling and low loss at millimetre wave. The two-stage cascaded analogue phase shifter showed insertion losses of 6.9±1.6 dB, return losses >10 dB, and maximum rms phase error of ±5.5° for the relative phase shift from −20° to 135°, over a wideband 27 to 47 GHz.
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Kim et al. (2002) studied this question.
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