Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

This paper presents an indirect adaptive controller combined with hysteresis compensation to achieve high accuracy positioning control of piezoceramic actuators and illustrates the results with an atomic force microscope (AFM) application. A dynamic model of a piezoceramic actuator system in AFM is derived and analyzed. A feedforward controller based on the Preisach model is proposed to compensate for the nonlinear hysteresis effects. Then an indirect adaptive controller is designed to achieve desired tracking performance as well as deal with the uncompensated nonlinearity from hysteresis and the system parameter variation due to creep. Experimental results indicate that the proposed controller can significantly improve the positioning control accuracy of the piezoceramic actuator as well as achieve high image quality of the AFM system. The maximum scanning error was reduced from 2µm to 0.3µm in comparison with a proportional‐integral‐derivative (PID) controller.