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July 1, 1991Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Reactive sputter deposition of zirconium nitride/aluminum nitride multilayers: Chemical competition effects and structural characterizations

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Authors

WMW. J. MengShanghai Jiao Tong UniversityJSJeffrey A. SellGeneral Motors (United States)RWRichard A. WaldoGeneral Motors (United States)

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Cite This Study

Meng et al. (1991) studied this question.

synapsesocial.com/papers/6a97982edfe10a478e9da52bhttps://doi.org/10.1116/1.577248
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