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November 1, 1993Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Deposition system for the synthesis of modulated, ultrathin-film composites

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Authors

LFLoreli FisterHewlett-Packard (United States)XLXiaomei LiChangchun University of Science and TechnologyJMJohn McConnellMPC Computers (United States)

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Fister et al. (1993) studied this question.

synapsesocial.com/papers/6a97aaba04c78a31a48be85ahttps://doi.org/10.1116/1.578290
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