Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation S. H. Kuah, P. C. Wood; Inductively coupled plasma etching of poly-SiC in SF6 chemistries. J. Vac. Sci. Technol. A 1 July 2005; 23 (4): 947–952. https://doi.org/10.1116/1.1913682 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search
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Kuah et al. (2005) studied this question.
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