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A PZT based micromachined ultrasonic transducer is proposed. This transducer can be used both for microphone and microspeaker. By using the temporary boron-doped silicon layer, high uniformity of the resonance frequency of transducers can be realized. Besides, choosing an appropriate thickness of the support silicon dioxide layer can minimize the residual stress of the multilayer membrane structure. These PZT based transducers with high sensitivity and high uniformity could be widely used in various practical ultrasonic systems.
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Zhu et al. (2006) studied this question.
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