Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in situ reflectometry

Vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic vapor phase epitaxy. Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.2% across a 3-in diameter wafer was achieved. This results in excellent uniformity of the lasing wavelength and threshold current of VCSEL devices. Employing pregrowth calibrations on growth rates periodically with an in situ reflectometer, we obtained a run-to-run wavelength reproducibility for 770- and 850-nm VCSELs of /spl plusmn/0.3% over the course of more than a hundred runs.