The optical absorption edges and the dispersion behaviour of the refractive index have been determined as a function of composition x for thin films of a-SiN x (:H), prepared (i) by glow-discharge decomposition of a gaseous mixture of silane and ammonia and (ii) by radio-frequency sputtering of silicon in an argon-nitrogen(-hydrogen) atmosphere. The data for films with and without hydrogen have been used to evaluate certain characteristic energies and these are then related to other experimental results, in particular those from photo-emission measurements.
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Davis et al. (1987) studied this question.
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