Thin films of lead scandium tantalate Pb(Sc0.5Ta0.5)03 (PST) have been prepared by a novel sol-gel process. The process involves two deposition steps. In the first, layers of ScTaO4 are deposited by spin coating a solution of metallorganic compounds of scandium and tantalum. A film of lead oxide is deposited intermittently onto the surface using a solution of lead acetate, and the process repeated to obtain thicker films. After firing, the composite film, a transparent film of PST is obtained. The crystallographic and morphological properties of the films have been analysed by X-ray diffraction and SEM and elemental analyses determined using EPMA. The films’ electrical properties have been measured against field and temperature, showing a strong induced pyroelectric response (3. 8 × 10−3Cm−2K−1), peak permittivities of 4500 and low loss. A high material figure-of-merit (11 × 10−5Pa−1/2) was obtained. Results are presented which illustrate the relationships between the properties and the observed structure of the films, with the processing conditions. A possible mechanism for the formation of perovskite PST is outlined.
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Patel et al. (1992) studied this question.
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