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A scanning Auger electron microscope equipped with a field emission gun was developed. This field emission gun has a beater which can bake the anode in the gun chamber. Gas desorption from the anode due to emitted electrons is reduced remarkably. Very stable cold emission is obtainable for more than eight hours without an additional flashing operation. The long working distance permits the positioning of the cylindrical mirror analyzer (CMA) at right angles with respect to the electron beam axis. The smallest probe diameter is 20 nm with a 2 × 10−9A probe current at 10 kV. The spatial Auger image resolution of 20 nm has been verified by a Si (LMM) Auger electron line-profile at the Si-Al boundary.
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Todokoro et al. (1981) studied this question.
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