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The bias-voltage-dependent permittivity of (Ba0.7Sr0.3)TiO3(BST) thin films with thicknesses ranging from 100 to 250nm is investigated in the frequency range from 500MHz to 40GHz by impedance spectroscopy of integrated BST capacitors. The dielectric spectra of the films exhibit resonance phenomena in the 4–7GHz range when a bias field is applied. It is shown that the main controlling parameter of the resonance frequency is the film thickness. Calculations based on the strong electrostrictive activity of the BST films underline the assumption that the emission of plane acoustic waves is the underlying mechanism for this behavior.
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Tappe et al. (2004) studied this question.
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