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June 1, 2007Journal of Microelectromechanical Systems

Command-Shaping Techniques for Electrostatic MEMS Actuation: Analysis and Simulation

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Authors

KCKuo‐Shen ChenNational Cheng Kung UniversityKOKuang-Shun OuNational Cheng Kung University

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Chen et al. (2007) studied this question.

synapsesocial.com/papers/6a9a39036bb205df309e57aahttps://doi.org/10.1109/jmems.2007.893512
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