Synthesis of Nanosized Aluminum Nitride Powders by Pulsed Laser Ablation

The influence of the target material, fluence, laser wavelength, and nitrogen pressure on the synthesis of AlN nanosized powders via reactive laser ablation has been investigated. Using infrared laser radiation and fluences of ≥11 J/cm 2 , pure AlN nanosized powders were produced at nitrogen pressures of ≥1.3 kPa via ablation of an AlN target and ≥13.3 kPa via ablation of an aluminum target. With ultraviolet laser radiation, AlN powders could be synthesized at a lower fluence (9 J/cm 2 at a pressure of 8 kPa). The mean powder size was 7.5−15 nm.