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ZnO:Cr films were deposited on water-cooled soda-lime glass substrates at room temperature in an Ar atmosphere by rf magnetron sputtering of a ZnO target on which Cr chips were placed. The films exhibited extraordinary stability against acids such as HCl or HNO3, and also high resistivities similar to those of ZnO films. The addition of Cr suppressed the growth of ZnO grains which resulted in the formation of a dense film with a smooth surface. The stability ahd high resistivity displayed by the ZnO:Cr films can be attributed to the formation of a chromium-oxide-rich grain boundary.
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Shinoda et al. (1993) studied this question.
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