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August 15, 1998Journal of Applied PhysicsOpen Access

Characterization of scanning tunneling microscopy and atomic force microscopy-based techniques for nanolithography on hydrogen-passivated silicon

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PFPhilippe FontaineSynchrotron soleilEDEmmanuel DuboisCentre National de la Recherche ScientifiqueDSD. StiévenardCentre National de la Recherche Scientifique

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Fontaine et al. (1998) studied this question.

synapsesocial.com/papers/6a9a75b0262e4da96990af3chttps://doi.org/10.1063/1.368334
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