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The authors have successfully developed a novel process for the deposition of multicomponent systems, namely radio-frequency (RF) plasma flash evaporation, in which powder mixtures of constituents are continuously injected into a RF plasma and are coevaporated and codeposited onto a substrate. The Y-Ba-Cu-O films prepared by this method showed excellent superconducting properties without postannealing; a deposition rate above several hundred nm/min was achieved. The film deposited on a MgO
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Terashima et al. (1990) studied this question.
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