We have found that the 1:1 Offner annular-field system can provide high-resolution imaging in the extreme ultraviolet (XUV) when used at numerical apertures (NA’s) around 0.1. For example, when illuminated with radiation at wavelengths shorter than 15 nm, a 0.0835-NA system with a 233.6-mm-diam primary mirror should be able to image 0.1-μm lines and spaces in a 100-micron-wide, 50-mm-radius ring-shaped field at high contrast.
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Wood et al. (1989) studied this question.
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