The recent literature dealing with the gas permeation characteristics of vacuum materials is reviewed. Experimental techniques for the measurement of gas diffusivity, permeability, and solubility in solids are discussed and evaluated, and computational techniques for the analysis of gas–solid permeation data are described. Materials discussed include alloys such as stainless steels and Kovar; pure metals such as copper, nickel, molybdenum, and tungsten; refractory oxides and ceramics; organic materials such as Viton, Teflon, and other elastomers; and laminated metal materials. Application of the results of diffusivity, permeability, and solubility measurements to the observed outgassing characteristics of some vacuum materials is discussed briefly.
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W. G. Perkins (1973) studied this question.