(001) surfaces of indium phosphide (InP) single crystals have been deformed at room temperature by a Vickers indenter. The indents formed were observed by transmission electron microscopy (TEM) in plan views as well as in cross-sectional views obtained by focused-ion beam (FIB) milling. The in-depth structure of the plastic zone has been investigated as well as the dislocation arrangements. The polarity of the crystal was determined by convergent beam electron diffraction (CBED) and the plastic anisotropy was discussed.
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Bourhis et al. (2000) studied this question.
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