A molecular kinetic model for the optical emission spectroscopy technique in inductively coupled nitrogen plasma

This is the authors' abstract. We don't add key points for this paper.

A molecular kinetic model used for the line-ratio technique of optical emission spectroscopy to determine electron temperature in an inductively coupled nitrogen plasma is investigated in the pressure range 0.4–100mTorr. Using the electron temperature and electron density measured by a Langmuir probe, the calculated line ratios are found to be in agreement with those measured by a spectrometer. Using this model, the relative contribution of various kinetic processes to the particle balance is analyzed over the whole pressure range.