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Signal intensities of coaxial impact collision ion scattering spectra have been computed for c-axis-oriented GaN films at various incident angles in order to analyse the lattice polarity based on the three-dimensional two-atom triple-scattering model. It was found that Ga and N signal intensities show specific incident angle dependences on (0001) and (0001̄) surfaces. The physical image of each characteristic feature in the spectra was also clarified.
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Sonoda et al. (1999) studied this question.
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