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August 1, 1985Journal of Applied Physics

Reaction of atomic fluorine with silicon

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Authors

KNKen NinomiyaKeio UniversityKSKeizô SuzukiSapporo Medical UniversitySNShigeru NishimatsuHitachi (Japan)

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Ninomiya et al. (1985) studied this question.

synapsesocial.com/papers/6a9c7808ccf76bb89d97928chttps://doi.org/10.1063/1.336133
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