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May 1, 1981Journal of Applied Physics

The reaction of fluorine atoms with silicon

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Authors

DFDaniel FlammS&F Systemtechnik (Germany)VDVincent M. DonnellyUniversity of HoustonJMJ. A. MuchaAT&T (United States)

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Flamm et al. (1981) studied this question.

synapsesocial.com/papers/6a7896ba2ea07b97ffae1d01https://doi.org/10.1063/1.329098
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