A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 ×1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.
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Tanaka et al. (1994) studied this question.
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