Uniform CW operation of multiple-wavelength vertical-cavity surface-emitting lasers fabricated by mask molecular beam epitaxy

Monolithically integrated four-wavelength vertical-cavity surface-emitting laser arrays are fabricated by mask molecular beam epitaxy. The lasing wavelengths are spaced by 5 nm, and their standard deviation for 10/spl times/12 VCSELs ranges from 0.27-0.38 nm. Uniform threshold current and 1.5-mW light output are achieved under continuous wave conditions.