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January 25, 2006IEEE Transactions on MagneticsOpen Access

Improvement of zone control induction heating equipment for high-speed processing of semiconductor devices

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Authors

DMDaisuke MiyagiChiba UniversityASA. V. S. S. R. SaiNTN. TakahashiHokkaido University of Science

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Miyagi et al. (2006) studied this question.

synapsesocial.com/papers/6a9cca83d6e0f897a22f034ehttps://doi.org/10.1109/tmag.2005.860823
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