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October 20, 1997Applied Physics Letters

Nanometer-scale linewidth fluctuations caused by polymer aggregates in resist films

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Authors

TYToru YamaguchiFujisawa City HospitalHNHideo NamatsuNTT (Japan)MNMasao NagaseTokushima University

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Cite This Study

Yamaguchi et al. (1997) studied this question.

synapsesocial.com/papers/6a9d6b2ef025b578bcd9b476https://doi.org/10.1063/1.120037
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