Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 109 cycles, and a current handling capability of 150 mA.
No takes yet. Share an insight, caveat, or question.
Majumder et al. (1997) studied this question.