Structural properties and epitaxial relation of cubic rock salt ScxAl1−xN/ScN/Si

This is the authors' abstract. We don't add key points for this paper.

ScN in the rock salt structure is a well-investigated material due to its desirable properties like the high hardness or large thermal conductivity. Recent computations by Adamski et al. [Appl. Phys. Lett. 115, 232103 (2019)] showed that ScN/GaN heterostructures exhibit an outstanding polarization gradient which would be beneficial for polarization induced electron gases. The pseudobinary semiconductor ScxAl1−xN, when maintaining the cubic rock salt structure, could be beneficial for tailoring the polarization gradient using the Sc dependency of material properties. The structural properties of rs-ScxAl1−xN are not fully discovered yet, thus in this work, DC-magnetron sputtered cubic rock salt ScxAl1−xN thin films with 0.55