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September 1, 2000Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Hysteresis and mode transitions in a low-frequency inductively coupled plasma

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SXShijie XuAnhui UniversityKOKostya OstrikovJiangnan UniversityWLWeixi LuoNorthwest Institute of Nuclear Technology

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Xu et al. (2000) studied this question.

synapsesocial.com/papers/6a9e4d02549d53af5cf6d5fahttps://doi.org/10.1116/1.1286142
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