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We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO 3 ). Using the sequential techniques of photolithographic patterning, electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50 μm × 50 μm × 5 mm in the x , z and y crystallographic directions, respectively, have been fabricated.
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Sones et al. (2001) studied this question.
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