The authors present a systematic investigation of the effects caused by electron-electron collisions on the electron kinetics in Ar under the action of DC and microwave fields. The analysis is based on solutions to the homogeneous electron Boltzmann equation using the effective field approximation, i.e. assuming that the electron energy distribution function is time independent. The calculated electron transport parameters and ionization coefficient are used together with a generalized charged particle balance equation to derive the characteristics for the maintenance field and the mean absorbed power per electron for steady-state DC and microwave discharges in Ar. Results are provided for the cases of (i) single-step ionization; (ii) multi-step ionization, via the metastable and the resonance levels of Ar.
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Sá et al. (1992) studied this question.
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