Twin-probe Atomic Force Microscopy with Optical Beam Deflection using Vertically Incident Lasers by Two Beam Splitter

This is the authors' abstract. We don't add key points for this paper.

We developed a twin-probe atomic force micrsocpy (AFM) system using Si-cantilever probes. The system utilizes the optical beam deflection method for detecting the deflection of each cantilever-probe mounted on each tube-type actuator. The cantilever-probes mounted on each actuator are realized independent control of the probe positions, which are attached to manual-sliders. Each displacement sensing sensitivity of two cantilever-probes achieves 90fm/√Hz or less. We succeeded the simultaneous observation of the topographic image under the state which they approached mutually with 40µm.