Calibration of the micro force sensors is necessary for the measurement of microNewton forces, which are critical to analytical applications of micro force sensor in the analysis of micromanipulators, microrobots and microgrippers. This paper proposes a novel calibration system to calibrate PZT thin film micro force sensor using the bimorph probe as the loading part. Sensitivities of PZT thin film micro force sensors were calibrated by the calibration system composed of the drive system and the testing system. The drive system combines 3-dimensional positioning stage, a bimorph probe and a frequency synthesizer, and the testing system combines an electronic balance for static state or a charge amplifier and a lock-in amplifier for the quasi static state.
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Cui et al. (2007) studied this question.
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