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October 3, 1988Applied Physics Letters

Controlled carbon doping of GaAs by metalorganic vapor phase epitaxy

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Authors

TKT. F. KuechUniversity of Wisconsin–MadisonMTM. A. TischlerRoche Pharma AG (Germany)PWP.-J. WangTianjin University

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Kuech et al. (1988) studied this question.

synapsesocial.com/papers/6a9ebefa37e106657b192b24https://doi.org/10.1063/1.100008
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  1. 1Improved detection of carbon in GaAs by secondary ion mass spectroscopy: The influence of hydrocarbons in metalorganic vapor phase epitaxy1988 · 15 citations