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July 1, 1990Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts

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DKDon L. KendallCalifornia Institute of Technology

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Don L. Kendall (1990) studied this question.

synapsesocial.com/papers/6a9ec7bfe2d0fc9581be776ahttps://doi.org/10.1116/1.576513
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