We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in theQof the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achievesQvalues of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.
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Xu et al. (2009) studied this question.
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