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We present a feasibility study of ZnO‐based FBAR devices and their fabrications for the ultra‐mass‐sensitive sensor application. In this work, a considerable shift in the resonance frequency is observed due to the mass‐loading effect by a mixture of ink and volatile methanol. A high sensitivity of 0.05 × 105 Hz · cm2/ng is obtained in the FBAR‐based device, which is ∼5 orders of magnitude higher than that of 0.057 Hz · cm2/ng reported in the conventional 5‐MHz quartz crystal microbalance. This approach seems useful for the ultra‐high‐mass resolution chemical sensor or biosensor applications.
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Mai et al. (2004) studied this question.
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