Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen-containing atmosphere

Experimental results are reported concerning the synthesis of pure, hard, and adherent titanium nitride layers by multipulse excimer (λ=308 nm) laser irradiation in a nitrogen or ammonia atmosphere. It is shown that the process is more efficient when the irradiation is performed in a nitrogen atmosphere. The general characteristics of synthesized surface compound layers are compatible with the requirements of utilization in microelectronics.