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September 2, 1996Applied Physics Letters

Selective oxidation of buried AlGaAs versus AlAs layers

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KCKent D. ChoquetteUniversity of Illinois Urbana-ChampaignKGK.M. GeibDartmouth CollegeHCH. C. ChuiHewlett-Packard (United States)

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Choquette et al. (1996) studied this question.

synapsesocial.com/papers/6a9ff2ecfda9be3cfdefdb67https://doi.org/10.1063/1.117589
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