Shallow surface gratings for high-power VCSELs with one preferred polarization for all modes

Monolithically integrated full-aperture surface gratings are shown to control the polarization of all modes of even highly multimode 850-nm oxide-confined standard industrial vertical-cavity surface-emitting lasers (VCSELs). An orthogonal polarization suppression ratio (OPSR) of more than 11 dB up to thermal rollover is achieved for an output power of 23 mW. For devices with 8-mW output power, an OPSR of more than 20 dB at thermal rollover is observed, without major drawbacks to the overall laser performance.