Subwavelength structures (SWSs) with a parabola shape are fabricated by a combination of laser interference lithography of a photoresist (PR), thermal reflow, and subsequent pattern transfer. The SWSs show antireflection properties in a broader wavelength range than conventional cone-shaped SWSs, and have potential in optoelectronics for improved device performance.
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Song et al. (2010) studied this question.
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