Microfluidic cells for the 1–102 MPa pressure range

Thin membrane-delimited fluid cells supporting up to 1 at (0.1 MPa) of pressure are well known and commercially available for use in vacuum chambers of electron, photon, or various particle beam microscopies or spectroscopies. Hereby, we report on the development of fluid cells capable of working at 1–10 MPa, extending the analysis domain for investigating chemical, biochemical, or physical processes at pressures of interest in chemical synthesis, underwater biochemistry studies or underground geology. We explored ways to optimize cell membranes to better resist pressure beyond simply increasing the thickness or decreasing the size of the membranes, using finite element analysis and experimental validation via membrane bulging experiments and failure statistics. Fluid cell prototypes were fabricated using ∼75 nm-thick SiN x membranes, engineered to withstand 4.7 MPa (average value), compared to regular (un-engineered) membranes withstanding only 3.4 MPa (average value). The fluid cell prototypes include eight microchannels for feeding/evacuating the fluids and applying pressure into micro-reaction chambers, two electrodes for electrochemical or conduction measurements in the sample, and a possible pressure or temperature sensor, customizable for specific experiments.