Development of an Innovative 5 µm φ Focused X-Ray Beam Energy-Dispersive Spectrometer and its Applications

A 5.7 µm φ X-ray microbeam spectrometer has been developed. It incorporates an approximately parabolic inner-surface X-ray guide tube made of glass and a Li-diffused Si X-ray detector with a large area of 200 mm2, developed to detect weak X-rays. An energy-dispersive spectrometer incorporating these components can simultaneously measure diffraction X-rays for observing local reactions and residual stresses, and fluorescent X-rays for analyzing least-amount-of-impurity elements in microregions during ULSI processing (900°C).