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March 1, 1978Journal of Vacuum Science and Technology

Significance of negative ion formation in sputtering and SIMS analysis

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Authors

JCJ. J. CuomoNorth Carolina State UniversityRGR. J. GambinoPurchase CollegeJHJ. M. E. HarperWestern University

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Cuomo et al. (1978) studied this question.

synapsesocial.com/papers/6aa217670c07007fbcb2b2f1https://doi.org/10.1116/1.569571
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