A novel method to reduce the parasitics of vertical-cavity surface-emitting lasers (VCSELs) using deep oxidation layers is proposed. Using this method, high-efficiency, high-speed 980 nm, tapered-aperture VCSELs with a −3 dB frequency of 17.9 GHz, the highest bandwidth without using proton implantation, are demonstrated.
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Chang et al. (2006) studied this question.
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