Laser-enhanced oxidation of gallium arsenide surfaces has been investigated. The oxidation was performed either in air or in pure water at room temperature. Light at ultraviolet wavelengths was found to enhance the oxidation rate much more strongly than at visible wavelengths. The oxidation in air leaves the surface almost stoichiometric, whereas the treatment in pure water results in a gallium-rich surface.
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Yu et al. (1986) studied this question.
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