The descriptions of diffraction by pure reflection gratings (fringes parallel to surfaces) and by reflection gratings with slanted fringes are clarified. The rigorous coupled-wave analysis, the chain-matrix analysis, and the new method presented by Zylberberg and Marom [ J. Opt. Soc. Am.73, 392 ( 1983)] are compared and their regions of applicability determined. Zylberberg and Marom refer to their method as a coupled-wave analysis, a description that is inconsistent with previous use of this terminology.
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Moharam et al. (1983) studied this question.
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