Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
September 1, 1976Journal of Vacuum Science and Technology

Introduction to ion and plasma etching

View Full Paper
Ask AI
Bookmark
Share

Authors

SSS. SomekhApplied Materials (United States)

Discussion

Loading...

Member takes

Implication

Key Points

Key points are not available for this paper at this time.

Cite This Study

S. Somekh (1976) studied this question.

synapsesocial.com/papers/6aa420abe0a56e090ff43e67https://doi.org/10.1116/1.569036
View Full Paper
Ask AI
Bookmark
Share