Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target

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The influence of the target operation mode on the chemical composition and crystalline structure of copper oxide films deposited onto a quartz glass substrate has been studied using Raman spectroscopy and X-ray phase analysis. The films have been synthesized in an Ar + O 2 gaseous environment using two identical magnetrons, differing only by the method of target cooling.